Invention Grant
- Patent Title: Aromatic underlayer
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Application No.: US16598264Application Date: 2019-10-10
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Publication No.: US12099300B2Publication Date: 2024-09-24
- Inventor: Sheng Liu , James F. Cameron , Shintaro Yamada , Iou-Sheng Ke , Keren Zhang , Daniel Greene , Paul J. LaBeaume , Li Cui , Suzanne M. Coley
- Applicant: Rohm and Haas Electronic Materials LLC
- Applicant Address: US MA Marlborough
- Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee: Rohm and Haas Electronic Materials LLC
- Current Assignee Address: US MA Marlborough
- Agent Jonathan D. Baskin
- Main IPC: G03F7/11
- IPC: G03F7/11 ; G03F7/075 ; G03F7/09 ; G03F7/20
Abstract:
Compounds having three or more alkynyl moieties substituted with an aromatic moiety having one or more of certain substituents are useful in forming underlayers useful in semiconductor manufacturing processes.
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