- 专利标题: LIDAR sensor using compound semiconductor materials for mobile device
-
申请号: US17739971申请日: 2022-05-09
-
公开(公告)号: US12107108B2公开(公告)日: 2024-10-01
- 发明人: Jonathan Klamkin
- 申请人: Aeluma, Inc.
- 申请人地址: US CA Goleta
- 专利权人: Aeluma, Inc.
- 当前专利权人: Aeluma, Inc.
- 当前专利权人地址: US CA Goleta
- 代理机构: Ogawa P.C.
- 代理商 Richard T. Ogawa
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; G01S7/481 ; G01S7/4863 ; G01S17/42 ; G01S17/88 ; G01S17/89 ; H01L23/00 ; H01L31/0304 ; H01L31/103 ; H01L31/105 ; H01L31/107 ; H01L31/02 ; H01L31/0216 ; H01L31/0232
摘要:
Techniques for realizing compound semiconductor (CS) optoelectronic devices on silicon (Si) substrates for mobile applications are disclosed. The integration platform is based on heteroepitaxy of CS materials and device structures on Si by direct heteroepitaxy on planar Si substrates or by selective area heteroepitaxy on dielectric patterned Si substrates. Following deposition of the CS device structures, device fabrication steps can be carried out using Si complimentary metal-oxide semiconductor (CMOS) fabrication techniques to enable large-volume manufacturing. The integration platform can enable manufacturing of optoelectronic devices including photodetector arrays for image sensors and vertical cavity surface emitting laser arrays. Such devices can be used in various applications including light detection and ranging (LIDAR) systems for mobile devices such as smart phones and tablets, and for other perception applications such as industrial vision, artificial intelligence (AI), augmented reality (AR) and virtual reality (VR).
公开/授权文献
- US20220415950A1 LIDAR SENSOR FOR MOBILE DEVICE 公开/授权日:2022-12-29
信息查询
IPC分类: