Invention Grant
- Patent Title: Methods and systems of optical inspection of electronic device manufacturing machines
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Application No.: US17247241Application Date: 2020-12-04
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Publication No.: US12215966B2Publication Date: 2025-02-04
- Inventor: Mohsin Waqar , Paul Zachary Wirth , Todd James Brill , Paul Edward Fisher , Ilias Iliopoulos , Charles Gregory Potter, Sr.
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: G01B11/14
- IPC: G01B11/14 ; G01B11/02 ; G01B11/06 ; G01B11/24 ; H01L21/66 ; H01L21/67 ; H01L21/677 ; H01L21/687 ; B25J11/00
Abstract:
Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.
Public/Granted literature
- US20210172728A1 METHODS AND SYSTEMS OF OPTICAL INSPECTION OF ELECTRONIC DEVICE MANUFACTURING MACHINES Public/Granted day:2021-06-10
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