公开(公告)号：US12215966B2

公开(公告)日：2025-02-04

申请号：US17247241

申请日：2020-12-04

Applicant: Applied Materials, Inc.

Inventor： Mohsin Waqar ,  Paul Zachary Wirth ,  Todd James Brill ,  Paul Edward Fisher ,  Ilias Iliopoulos ,  Charles Gregory Potter, Sr.

IPC: G01B11/14 ,  G01B11/02 ,  G01B11/06 ,  G01B11/24 ,  H01L21/66 ,  H01L21/67 ,  H01L21/677 ,  H01L21/687 ,  B25J11/00

Abstract: Implementations disclosed describe an inspection device capable of being transferred by a robot blade into a processing chamber of a manufacturing machine, the inspection device comprising an optical sensor to detect light reflected from a target located within the processing chamber, wherein the optical sensor is to output, to a processing device, a signal representative of a state of a region of a surface of the target.

公开(公告)号：US10522380B2

公开(公告)日：2019-12-31

申请号：US14310560

申请日：2014-06-20

Applicant: APPLIED MATERIALS, INC.

Inventor： Charles Gregory Potter, Sr.

IPC: H01L21/68

Abstract: Methods for determining substrate placement in a process chamber are provided herein. In some embodiments, a method for determining substrate placement in a process chamber includes receiving sensor readings from a plurality of sensor arrays attached to the calibration substrate, calculating locations of a plurality of edge locations of a support member beneath the sensors based on the sensor readings, calculating a center point location of the support member based on the locations of the plurality of edge locations of the support member and determining an offset between the center point location and a location of the center of the calibration substrate.