Invention Grant
- Patent Title: Reflective mask blank for EUV lithography and substrate with conductive film
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Application No.: US18439057Application Date: 2024-02-12
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Publication No.: US12235575B2Publication Date: 2025-02-25
- Inventor: Yusuke Ono , Hiroshi Hanekawa , Hirotomo Kawahara
- Applicant: AGC INC.
- Applicant Address: JP Tokyo
- Assignee: AGC INC.
- Current Assignee: AGC INC.
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2021-157976 20210928
- Main IPC: G03F1/24
- IPC: G03F1/24

Abstract:
A reflective mask blank for EUV lithography, includes: a substrate; a conductive film; a reflective layer; and an absorption layer, the absorption layer absorbing the EUV light, wherein the conductive film has a refractive index nλ1000-1100 nm of 5.300 or less and has an extinction coefficient kλ1000-1100 nm of 5.200 or less, at a wavelength of 1000 nm to 1100 nm, the conductive film has a refractive index nλ600-700 nm of 4.300 or less and has an extinction coefficient kλ600-700 nm of 4.500 or less, at a wavelength of 600 nm to 700 nm, the conductive film has a refractive index nλ400-500 nm of 2.500 or more and has an extinction coefficient kλ400-500 nm of 0.440 or more, at a wavelength of 400 nm to 500 nm, and the conductive film has a film thickness t of 40 nm to 350 nm.
Public/Granted literature
- US20240184191A1 REFLECTIVE MASK BLANK FOR EUV LITHOGRAPHY AND SUBSTRATE WITH CONDUCTIVE FILM Public/Granted day:2024-06-06
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