发明申请
- 专利标题: Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface
- 专利标题(中): 用于在工件表面上的材料的电化学沉积和平坦化的方法和装置
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申请号: US10921666申请日: 2004-08-18
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公开(公告)号: US20050016681A1公开(公告)日: 2005-01-27
- 发明人: Ismail Emesh , Periya Gopalan , Phillip Rayer , Bentley Palmer
- 申请人: Ismail Emesh , Periya Gopalan , Phillip Rayer , Bentley Palmer
- 主分类号: B23H5/08
- IPC分类号: B23H5/08 ; C25D7/12 ; C25D17/14 ; C25F7/00 ; H01L21/288 ; H01L21/321 ; C23F1/00
摘要:
An electrochemical apparatus is provided which deposits material onto or removes material from the surface of a workpiece. The apparatus comprises a polishing pad and a platen which is in turn comprised of a first conductive layer in contact with the polishing pad and coupled to a first potential, a second conductive layer coupled to a second potential, and a first insulating layer disposed between the first and second conductive layers. At least one electrical contact is positioned within the polishing pad and is electrically coupled to the second conductive layer. A reservoir is provided which places an electrolyte solution in contact with the polishing pad and the workpiece. A carrier positions and/or presses the workpiece against the polishing pad.
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