发明申请
- 专利标题： Electrolytic processing apparatus and method
- 专利标题（中）： 电解处理装置及方法
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申请号： US10498042申请日： 2002-12-11
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公开(公告)号： US20050051432A1公开(公告)日： 2005-03-10
- 发明人: Mitsuhiko Shirakashi , Masayuki Kumekawa , Hozumi Yasuda , Itsuki Kobata
- 申请人： Mitsuhiko Shirakashi , Masayuki Kumekawa , Hozumi Yasuda , Itsuki Kobata
- 优先权： JP2001-380641 20011213; JP2002-67393 20020312
- 国际申请： PCT/JP02/12973 WO 20021211
- 主分类号： B23H3/02
- IPC分类号： B23H3/02 ; B23H5/08 ; C25F3/00 ; C25F7/00 ; H01L21/321 ; C25D21/12 ; C25D5/00
摘要：
There is provided an electrolytic processing apparatus and method that can effect processing of a workpiece with high processing precision and can produce an intended form of processed workpiece with high accuracy of form. The electrolytic processing apparatus includes: a processing electrode which can come close to a workpiece; a feeding electrode for feeding electricity to the workpiece; an ion exchanger disposed in at least one of the space between the workpiece and the processing electrode and the space between the workpiece and the feeding electrode; a fluid supply section for supplying a fluid to the space between the workpiece and at least one of the processing electrode and the feeding electrode; and a power source for supplying an electric power between the processing electrode and the feeding electrode while arbitrarily controlling at least one of a voltage and an electric current.
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