发明申请
- 专利标题: Semiconductor device and method for manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
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申请号: US10963822申请日: 2004-10-14
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公开(公告)号: US20050082537A1公开(公告)日: 2005-04-21
- 发明人: Tatsuya Arao , Takeshi Noda , Takuya Matsuo , Hidehito Kitakado , Masanori Kyoho
- 申请人: Tatsuya Arao , Takeshi Noda , Takuya Matsuo , Hidehito Kitakado , Masanori Kyoho
- 申请人地址: JP Atsugi-shi JP Osaka-shi
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.,Sharp Kabushiki Kaisha
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.,Sharp Kabushiki Kaisha
- 当前专利权人地址: JP Atsugi-shi JP Osaka-shi
- 优先权: JP2003-355882 20031016
- 主分类号: G02F1/1343
- IPC分类号: G02F1/1343 ; G02F1/1368 ; H01L21/20 ; H01L21/28 ; H01L21/336 ; H01L21/77 ; H01L21/86 ; H01L27/12 ; H01L29/423 ; H01L29/49 ; H01L29/786 ; H01L29/04
摘要:
A semiconductor device that can be manufactured with a reduced cost by decreasing the number of masks is disclosed, and a method for manufacturing the semiconductor device is disclosed. The method for manufacturing the semiconductor device comprises the steps of: forming a semiconductor layer 3 having a source and a drain regions 10, 11, and LDD regions 16, 17; a gate insulating film 5; and a gate electrode 6; forming a first and a second interlayer insulating films 24, 25 over the gate electrode 6 and the gate insulating film 5; forming contact holes 25a, 25c to these interlayer insulating films so as to be located over each of the source region and the drain region; and an opening portion 25b to these interlayer insulating films so as to be located over the gate electrode and the LDD region; forming a second gate electrode 26b by a conductive film in the opening portion so as to cover the gate electrode and the LDD region; and a pixel electrode 26a over the second interlayer insulating film; removing the gate insulating film in the contact hole; and forming wirings 27, 28 connected to each the source region and the drain region.
公开/授权文献
- US07157321B2 Semiconductor device and method for manufacturing the same 公开/授权日:2007-01-02
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