发明申请
- 专利标题: Semiconductor device
- 专利标题(中): 半导体器件
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申请号: US10997905申请日: 2004-11-29
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公开(公告)号: US20050116268A1公开(公告)日: 2005-06-02
- 发明人: Koichi Tahira , Hiroki Usui , Hiroshi Hasegawa , Makoto Aikawa
- 申请人: Koichi Tahira , Hiroki Usui , Hiroshi Hasegawa , Makoto Aikawa
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JPP2003-405343 20030412
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; H01L21/822 ; H01L21/8234 ; H01L21/8238 ; H01L27/02 ; H01L27/06 ; H01L27/092 ; H01L29/423 ; H01L21/336 ; H01L29/76 ; H01L31/062 ; H01L31/119
摘要:
A semiconductor device of the generation with the minimum processing dimensions of 90 nm, or later, wherein variation of processing dimensions of gate electrodes in a logic block and a power source noise are suppressed; wherein a gate electrode formed to have a comb-shaped pattern is formed on a normal cell region, a dummy gate electrode formed to have a comb-shaped pattern is formed on a vacant region, a wiring for applying a predetermined voltage is connected respectively to at least a part of the dummy gate and the semiconductor substrate (source drain regions), and an electrostatic capacity between the part of the dummy gate electrode and the semiconductor substrate constitutes a decoupling capacitor of the power source.
公开/授权文献
- US07456446B2 Semiconductor device 公开/授权日:2008-11-25
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