发明申请
- 专利标题： Contact-connection of nanotubes
- 专利标题（中）： 纳米管的接触连接
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申请号： US10980983申请日： 2004-11-03
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公开(公告)号： US20050148174A1公开(公告)日： 2005-07-07
- 发明人: Eugen Unger , Georg Dusberg , Franz Kreupl , Andrew Graham , Maik Liebau
- 申请人： Eugen Unger , Georg Dusberg , Franz Kreupl , Andrew Graham , Maik Liebau
- 申请人地址： DE Munich 81669
- 专利权人： Infineon Technologies AG
- 当前专利权人： Infineon Technologies AG
- 当前专利权人地址： DE Munich 81669
- 优先权： DE10220194.3 20020506
- 主分类号： C23C18/16
- IPC分类号： C23C18/16 ; H01L21/288 ; H01L23/522 ; H01L23/532 ; H01L51/30 ; H01L29/417 ; H01J1/02 ; H01L21/44 ; H01L29/74 ; H01L31/111
摘要：
Process for contact-connection of carbon nanotubes as part of their integration in an electric circuit, wherein the nanotubes, after they have been applied to metallic interconnects of the electric circuit, are connected to the interconnects at contact locations by electroless metallization.
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