发明申请
US20050218460A1 Semiconductor integrated circuit device with a stacked gate including a floating gate and a control gate
失效
具有包括浮动栅极和控制栅极的堆叠栅极的半导体集成电路器件
- 专利标题: Semiconductor integrated circuit device with a stacked gate including a floating gate and a control gate
- 专利标题(中): 具有包括浮动栅极和控制栅极的堆叠栅极的半导体集成电路器件
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申请号: US11083156申请日: 2005-03-18
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公开(公告)号: US20050218460A1公开(公告)日: 2005-10-06
- 发明人: Takehiro Hasegawa , Akira Umezawa , Koji Sakui , Fumitaka Arai , Ryo Mitani
- 申请人: Takehiro Hasegawa , Akira Umezawa , Koji Sakui , Fumitaka Arai , Ryo Mitani
- 优先权: JP2004-080811 20040319
- 主分类号: G11C16/04
- IPC分类号: G11C16/04 ; G11C16/02 ; H01L21/00 ; H01L21/336 ; H01L21/8247 ; H01L27/04 ; H01L27/10 ; H01L27/105 ; H01L27/115 ; H01L29/788 ; H01L29/792
摘要:
A semiconductor integrated circuit device includes first and second nonvolatile semiconductor memories. The first memory has first and second select transistors and first memory cell transistors. The first memory cell transistor has a first floating gate on a first gate insulating film and a first control gate on a first inter-gate insulating film. The second memory has a third select transistor and a second memory cell transistor. The second memory cell transistor has a second floating gate on a second gate insulating film and a second control gate on a second inter-gate insulating film. The first and second gate insulating films have the same film thickness. The first and second floating gates have the same film thickness. The first and second inter-gate insulating films have the same film thickness. The first and second control gates have the same film thickness.
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