发明申请
- 专利标题: Magnetic memory device and method of manufacturing the same
- 专利标题(中): 磁记忆体装置及其制造方法
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申请号: US11171323申请日: 2005-07-01
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公开(公告)号: US20050254289A1公开(公告)日: 2005-11-17
- 发明人: Kentaro Nakajima , Minoru Amano , Tomomasa Ueda , Shigeki Takahashi
- 申请人: Kentaro Nakajima , Minoru Amano , Tomomasa Ueda , Shigeki Takahashi
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2003-200413 20030723
- 主分类号: H01L27/105
- IPC分类号: H01L27/105 ; C23F4/00 ; G11C11/00 ; G11C11/02 ; H01F10/32 ; H01F41/30 ; H01L21/336 ; H01L21/8246 ; H01L27/00 ; H01L27/22 ; H01L29/76 ; H01L31/119 ; H01L43/08 ; H01L43/12
摘要:
A method of manufacturing a magnetic memory device includes forming an insulation layer on a substrate, forming a lower electrode on the insulation layer, forming a magneto-resistive film on an upper surface of the lower electrode, the magneto-resistive film including an insulation barrier layer and a plurality of magnetic films stacked on both sides of the insulation barrier layer, stacking a mask layer on the magneto-resistive film, performing ion etching on the magneto-resistive film, using the mask layer as a mask, thereby forming a magneto-resistive element, forming an insulation film on upper surfaces of the mask, the magneto-resistive element and the lower electrode, and etching the insulation film with an ion beam such that a side surface of the magneto-resistive element is exposed.
公开/授权文献
- US07291506B2 Magnetic memory device and method of manufacturing the same 公开/授权日:2007-11-06
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