发明申请
US20050271823A1 Precursor composition, method for manufacturing precursor composition, method for manufacturing ferroelectric film, piezoelectric element, semiconductor device, piezoelectric actuator, ink jet recording head, and ink jet printer
有权
前体组合物,前体组合物的制造方法,铁电体膜的制造方法,压电元件,半导体装置,压电致动器,喷墨记录头,喷墨打印机
- 专利标题: Precursor composition, method for manufacturing precursor composition, method for manufacturing ferroelectric film, piezoelectric element, semiconductor device, piezoelectric actuator, ink jet recording head, and ink jet printer
- 专利标题(中): 前体组合物,前体组合物的制造方法,铁电体膜的制造方法,压电元件,半导体装置,压电致动器,喷墨记录头,喷墨打印机
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申请号: US11129475申请日: 2005-05-16
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公开(公告)号: US20050271823A1公开(公告)日: 2005-12-08
- 发明人: Takeshi Kijima , Yasuaki Hamada , Mayumi Ueno
- 申请人: Takeshi Kijima , Yasuaki Hamada , Mayumi Ueno
- 申请人地址: JP Tokyo
- 专利权人: Seiko Epson Corporation
- 当前专利权人: Seiko Epson Corporation
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-162100 20040531; JP2004-211115 20040720; JP2004-319213 20041102; JP2004-380987 20041228
- 主分类号: B41J2/045
- IPC分类号: B41J2/045 ; B41J2/055 ; B41J2/135 ; B41J2/14 ; B41J2/16 ; C01G25/00 ; C01G33/00 ; C04B35/49 ; C04B35/493 ; C04B35/624 ; C23C18/12 ; H01L21/316 ; H01L21/8246 ; H01L27/105 ; H01L27/115 ; H01L41/08 ; H01L41/09 ; H01L41/187 ; H01L41/318 ; H01L41/39 ; B05D5/12 ; C04B35/46 ; C04B35/48
摘要:
To provide precursor compositions for forming ferroelectric, methods for manufacturing precursor compositions, and methods for forming ferroelectric films using precursor compositions, which have excellent composition controllability in a liquid phase method, and in which metal compositions such as lead can be reused. A precursor composition pertains to a precursor composition including a precursor for forming a ferroelectric, wherein the ferroelectric is expressed by a general formula of AB1-xCxO3, where an element A is composed of at least Pb, an element B is composed of at least one of Zr, Ti, V, W and Hf, an element C is composed of at least one of Nb and Ta, and the precursor includes at least the element B and the element C, and has an ester-bond in a part thereof.
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