Invention Application
- Patent Title: Lithographic apparatus and device manufacturing method
- Patent Title (中): 平版印刷设备和器件制造方法
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Application No.: US10896000Application Date: 2004-07-22
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Publication No.: US20060017894A1Publication Date: 2006-01-26
- Inventor: Tjarko Adriaan Van Empel , Erik Loopstra , Antonius Van Der Net , Yuri Johannes Van De Vijver , Bernhard Gellrich , Bauke Jansen , Rens Sanderse
- Applicant: Tjarko Adriaan Van Empel , Erik Loopstra , Antonius Van Der Net , Yuri Johannes Van De Vijver , Bernhard Gellrich , Bauke Jansen , Rens Sanderse
- Applicant Address: NL DR Veldhoven
- Assignee: ASML NETHERLAND B.V.
- Current Assignee: ASML NETHERLAND B.V.
- Current Assignee Address: NL DR Veldhoven
- Main IPC: G03B27/52
- IPC: G03B27/52

Abstract:
A lithographic apparatus is disclosed. The apparatus includes a projection system configured to project a patterned radiation beam onto a target portion of a substrate. The projection system includes a housing and a plurality of optical elements arranged in the housing. The apparatus also includes an inlet for feeding conditioned gas to the housing and a gas exhaust for exhausting the conditioned gas from the housing for providing a gas conditioned environment in the housing. At least one gate is provided for providing communication of the gas conditioned environment with ambient atmosphere. The gate is arranged to provide a predetermined leakage of the conditioned gas to the ambient atmosphere.
Public/Granted literature
- US07446849B2 Lithographic apparatus and device manufacturing method Public/Granted day:2008-11-04
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