- 专利标题: Method of forming a bond pad on an I/C chip and resulting structure
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申请号: US11271760申请日: 2005-11-10
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公开(公告)号: US20060081981A1公开(公告)日: 2006-04-20
- 发明人: Julie Biggs , Tien-Jen Cheng , David Eichstadt , Lisa Fanti , Jonathan Griffith , Randolph Knarr , Sarah Knickerbocker , Kevin Petrarca , Roger Quon , Wolfgang Sauter , Kamalesh Srivastava , Richard Volant
- 申请人: Julie Biggs , Tien-Jen Cheng , David Eichstadt , Lisa Fanti , Jonathan Griffith , Randolph Knarr , Sarah Knickerbocker , Kevin Petrarca , Roger Quon , Wolfgang Sauter , Kamalesh Srivastava , Richard Volant
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/48
- IPC分类号: H01L23/48 ; H01L21/44
摘要:
A method of forming wire bonds in (I/C) chips comprising: providing an I/C chip having a conductive pad for a wire bond with at least one layer of dielectric material overlying the pad; forming an opening through the dielectric material exposing a portion of said pad. Forming at least a first conductive layer on the exposed surface of the pad and on the surface of the opening. Forming a seed layer on the first conductive layer; applying a photoresist over the seed layer; exposing and developing the photoresist revealing the surface of the seed layer surrounding the opening; removing the exposed seed layer; removing the photoresist material in the opening revealing the seed layer. Plating at least one second layer of conductive material on the seed layer in the opening, and removing the first conductive layer on the dielectric layer around the opening. The invention also includes the resulting structure.
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