Invention Application
- Patent Title: Method of forming a bond pad on an I/C chip and resulting structure
-
Application No.: US11271760Application Date: 2005-11-10
-
Publication No.: US20060081981A1Publication Date: 2006-04-20
- Inventor: Julie Biggs , Tien-Jen Cheng , David Eichstadt , Lisa Fanti , Jonathan Griffith , Randolph Knarr , Sarah Knickerbocker , Kevin Petrarca , Roger Quon , Wolfgang Sauter , Kamalesh Srivastava , Richard Volant
- Applicant: Julie Biggs , Tien-Jen Cheng , David Eichstadt , Lisa Fanti , Jonathan Griffith , Randolph Knarr , Sarah Knickerbocker , Kevin Petrarca , Roger Quon , Wolfgang Sauter , Kamalesh Srivastava , Richard Volant
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L21/44

Abstract:
A method of forming wire bonds in (I/C) chips comprising: providing an I/C chip having a conductive pad for a wire bond with at least one layer of dielectric material overlying the pad; forming an opening through the dielectric material exposing a portion of said pad. Forming at least a first conductive layer on the exposed surface of the pad and on the surface of the opening. Forming a seed layer on the first conductive layer; applying a photoresist over the seed layer; exposing and developing the photoresist revealing the surface of the seed layer surrounding the opening; removing the exposed seed layer; removing the photoresist material in the opening revealing the seed layer. Plating at least one second layer of conductive material on the seed layer in the opening, and removing the first conductive layer on the dielectric layer around the opening. The invention also includes the resulting structure.
Public/Granted literature
- US07572726B2 Method of forming a bond pad on an I/C chip and resulting structure Public/Granted day:2009-08-11
Information query
IPC分类: