发明申请
- 专利标题: THIN FILM CIRCUIT
- 专利标题(中): 薄膜电路
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申请号: US11462886申请日: 2006-08-07
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公开(公告)号: US20060267018A1公开(公告)日: 2006-11-30
- 发明人: Shunpei YAMAZAKI , Jun KOYAMA , Hisashi OHTANI
- 申请人: Shunpei YAMAZAKI , Jun KOYAMA , Hisashi OHTANI
- 申请人地址: JP Atsugi-shi
- 专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- 当前专利权人地址: JP Atsugi-shi
- 优先权: JP08-358957 19961230
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
A practical operational amplifier circuit is formed using thing film transisters. An operational amplifier circuit is formed by thin film transistors formed on a quartz substrate wherein cumulative distribution of mobilities of the n-channel type thin film transistors becomes 90% or more at 260 cm2/Vs and wherein cumulative distribution of mobilities of the p-channel type thin film transistors becomes 90% or more at 150 cm2/Vs. The thin film transistors have active layers formed using a crystalline silicon film fabricated using a metal element that selected to promote crystallization of silicon. The crystalline silicon film is a collection of a multiplicity of elongate crystal structures extending in a certain direction, and the above-described characteristics can be achieved by matching the extending direction and the moving direction of carriers.
公开/授权文献
- US07759681B2 Thin film circuit 公开/授权日:2010-07-20
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