发明申请
- 专利标题： Saw-Component Having a Reduced Temperature Path and Method for the Production Thereof
- 专利标题（中）： 具有降低温度路径的锯组件及其生产方法
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申请号： US11574904申请日： 2005-08-18
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公开(公告)号： US20070296306A1公开(公告)日： 2007-12-27
- 发明人: Markus Hauser , Ulrich Knauer , Anton Leidl , Evelyn Riha , Gerd Riha , Ulrike Rosler , Werner Ruile , Clemens Ruppel , Gerd Scholl , Ulrich Wolff
- 申请人： Markus Hauser , Ulrich Knauer , Anton Leidl , Evelyn Riha , Gerd Riha , Ulrike Rosler , Werner Ruile , Clemens Ruppel , Gerd Scholl , Ulrich Wolff
- 优先权： DE102004045181.8 20040917
- 国际申请： PCT/EP05/08964 WO 20050818
- 主分类号： H03H3/10
- IPC分类号： H03H3/10 ; H01L41/083 ; H03H9/02 ; H03H9/08
摘要：
Elements and methods for forming elements that operate with acoustic waves are disclosed. The element includes a piezoelectric electric substrate that has a first thermal coefficient of expansion, electrically conducting element structures on an upper side of the substrate, a compensation layer on an underside of the substrate, and an SiO2 layer over the element structures.
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