发明申请
- 专利标题： INTERNAL GEAR PUMP
- 专利标题（中）： 内齿轮泵
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申请号： US11794910申请日： 2006-01-06
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公开(公告)号： US20100035082A1公开(公告)日： 2010-02-11
- 发明人: Taro Hitosugi , Yutaka Furubayashi , Tetsuya Hasegawa , Yasushi Hirose , Junpei Kasai , Miki Moriyama
- 申请人： Taro Hitosugi , Yutaka Furubayashi , Tetsuya Hasegawa , Yasushi Hirose , Junpei Kasai , Miki Moriyama
- 优先权： JP2005-029722 20050108
- 国际申请： PCT/JP2006/000102 WO 20060106
- 主分类号： H01L21/70
- IPC分类号： H01L21/70 ; C23C14/08 ; C23C14/28 ; C30B29/16 ; B05D5/12
摘要：
There have been demands for transparent electrode materials and magnetic materials, each having a wide range of applications. In view of the situations, a novel functional device and a method for forming an oxide material are provided. A functional device includes an AlxGayInzN layer (wherein 0≦x≦1, 0≦y≦1, and 0≦z≦1) and an oxide material layer composed of a metal oxide and formed on the AlxGayInzN layer. The metal oxide may be TiO2. The present invention provides a functional device that includes a group III nitride layer having excellent physical and chemical properties and a film integrally formed thereon. The film reflects less light at the interface and has chemical resistance and high durability.
公开/授权文献
- US07968216B2 Internal gear pump 公开/授权日：2011-06-28
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