发明申请
- 专利标题: POSITIVE RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN USING THE SAME, AND POLYMERIC COMPOUND
- 专利标题(中): 正极性组合物,使用其的耐热图案的形成方法和聚合物
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申请号: US12687430申请日: 2010-01-14
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公开(公告)号: US20100196821A1公开(公告)日: 2010-08-05
- 发明人: Takahiro Dazai , Daiju Shiono , Tomoyuki Hirano , Tasuku Matsumiya , Masaru Takeshita
- 申请人: Takahiro Dazai , Daiju Shiono , Tomoyuki Hirano , Tasuku Matsumiya , Masaru Takeshita
- 申请人地址: JP Kawasaki-shi
- 专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人: TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址: JP Kawasaki-shi
- 优先权: JP2009-014713 20090126
- 主分类号: G03F7/20
- IPC分类号: G03F7/20 ; G03F7/004 ; C08F220/26 ; C08F228/06
摘要:
A positive resist composition including a base component (A) which exhibits changed solubility in an alkali developing solution under the action of acid and an acid-generator component (B) which generates acid upon exposure dissolved in an organic solvent (S), the base component (A) containing a polymeric compound (A1) including a structural unit (a0) derived from an acrylate ester having a cyclic group containing a sulfonyl group on the side chain thereof, a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group and a structural unit (a5) represented by general formula (a5-1) (Y1 represents an aliphatic hydrocarbon group; Z represents a monovalent organic group; a represents an integer of 1 to 3, and b represents an integer of 0 to 2, provided that a+b=1 to 3).
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