Invention Application
- Patent Title: SILICON CARBIDE SEMICONDUCTOR DEVICE
- Patent Title (中): 硅碳化硅半导体器件
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Application No.: US12867061Application Date: 2008-02-12
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Publication No.: US20100314629A1Publication Date: 2010-12-16
- Inventor: Yoichiro Tarui , Kenichi Ohtsuka , Naruhisa Miura , Yoshinori Matsuno , Masayuki Imaizumi
- Applicant: Yoichiro Tarui , Kenichi Ohtsuka , Naruhisa Miura , Yoshinori Matsuno , Masayuki Imaizumi
- Applicant Address: JP Tokyo
- Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee: MITSUBISHI ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- International Application: PCT/JP2008/052230 WO 20080212
- Main IPC: H01L31/0312
- IPC: H01L31/0312

Abstract:
In order to obtain a silicon carbide semiconductor device that ensures both stability of withstand voltage and reliability in high-temperature operations in its termination end-portion provided for electric-field relaxation in the perimeter of a cell portion driven as a semiconductor element, the termination end-portion is provided with an inorganic protection film having high heat resistance that is formed on an exposed surface of a well region as a first region formed on a side of the cell portion, and an organic protection film having a high electrical insulation capability with a little influence by electric charges that is formed on a surface of an electric-field relaxation region formed in contact relation to an outer lateral surface of the well region and apart from the cell portion, and on an exposed surface of the silicon carbide layer.
Public/Granted literature
- US08680538B2 Silicon carbide semiconductor device Public/Granted day:2014-03-25
Information query
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