发明申请
- 专利标题: RAPIDLY CLEANABLE ELECTROPLATING CUP SEAL
- 专利标题(中): 快速清洁电镀密封
-
申请号: US13079745申请日: 2011-04-04
-
公开(公告)号: US20110181000A1公开(公告)日: 2011-07-28
- 发明人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- 申请人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- 申请人地址: US CA San Jose
- 专利权人: NOVELLUS SYSTEMS, INC.
- 当前专利权人: NOVELLUS SYSTEMS, INC.
- 当前专利权人地址: US CA San Jose
- 主分类号: F16J15/16
- IPC分类号: F16J15/16
摘要:
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
公开/授权文献
- US08398831B2 Rapidly cleanable electroplating cup seal 公开/授权日:2013-03-19