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公开(公告)号:US07935231B2
公开(公告)日:2011-05-03
申请号:US11932595
申请日:2007-10-31
申请人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
发明人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
CPC分类号: C25D17/001 , C25D17/004 , C25D17/005 , C25D21/08
摘要: Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
摘要翻译: 公开了一种在电镀系统在线时能够快速清洁的闭式电镀杯组件的实施例。 一个公开的实施例包括杯组件和锥形组件,其中杯组件包括杯底,其包括开口,围绕开口的密封件,包括围绕开口设置的多个电触点的电接触结构,以及内杯侧 其沿着杯的轴向方向从杯形顶部向杯底部向内渐缩。
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公开(公告)号:US08398831B2
公开(公告)日:2013-03-19
申请号:US13079745
申请日:2011-04-04
申请人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
发明人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
CPC分类号: C25D17/001 , C25D17/004 , C25D17/005 , C25D21/08
摘要: Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
摘要翻译: 公开了一种在电镀系统在线时能够快速清洁的闭式电镀杯组件的实施例。 一个公开的实施例包括杯组件和锥形组件,其中杯组件包括杯底,其包括开口,围绕开口的密封件,包括围绕开口设置的多个电触点的电接触结构,以及内杯侧 其沿着杯的轴向方向从杯形顶部向杯底部向内渐缩。
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公开(公告)号:US20110181000A1
公开(公告)日:2011-07-28
申请号:US13079745
申请日:2011-04-04
申请人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
发明人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
IPC分类号: F16J15/16
CPC分类号: C25D17/001 , C25D17/004 , C25D17/005 , C25D21/08
摘要: Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
摘要翻译: 公开了一种在电镀系统在线时能够快速清洁的闭式电镀杯组件的实施例。 一个公开的实施例包括杯组件和锥形组件,其中杯组件包括杯底,其包括开口,围绕开口的密封件,包括围绕开口设置的多个电触点的电接触结构,以及内杯侧 其沿着杯的轴向方向从杯形顶部向杯底部向内渐缩。
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公开(公告)号:US20090107835A1
公开(公告)日:2009-04-30
申请号:US11932595
申请日:2007-10-31
申请人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
发明人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
IPC分类号: C25B9/00
CPC分类号: C25D17/001 , C25D17/004 , C25D17/005 , C25D21/08
摘要: Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
摘要翻译: 公开了一种在电镀系统在线时能够快速清洁的闭式电镀杯组件的实施例。 一个公开的实施例包括杯组件和锥形组件,其中杯组件包括杯底,其包括开口,围绕开口的密封件,包括围绕开口设置的多个电触点的电接触结构,以及内杯侧 其沿着杯的轴向方向从杯形顶部向杯底部向内渐缩。
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公开(公告)号:US08377268B2
公开(公告)日:2013-02-19
申请号:US13154224
申请日:2011-06-06
申请人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
发明人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
CPC分类号: C25D17/001 , C25D7/123 , C25D17/02
摘要: Embodiments of a closed-contact electroplating cup are disclosed. One embodiment comprises a cup bottom comprising an opening, and a seal disposed on the cup bottom around the opening. The seal comprises a wafer-contacting peak located substantially at an inner edge of the seal. The embodiment also comprises an electrical contact structure disposed over a portion of the seal, wherein the electrical contact structure comprises an outer ring and a plurality of contacts extending inwardly from the outer ring, and wherein each contact has a generally flat wafer-contacting surface. The embodiment further comprises a wafer-centering mechanism configured to center a wafer in the cup.
摘要翻译: 公开了一种闭式电镀杯的实施例。 一个实施例包括一个包括一个开口的杯底,以及一个围绕开口设置在杯底的密封件。 密封件包括基本上位于密封件的内边缘处的与晶片接触的峰。 该实施例还包括设置在密封件的一部分上的电接触结构,其中电接触结构包括外环和从外环向内延伸的多个触点,并且其中每个触头具有大致平坦的晶片接触表面。 该实施例还包括晶圆定心机构,其配置成使晶片位于杯中心。
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公开(公告)号:US07985325B2
公开(公告)日:2011-07-26
申请号:US11929638
申请日:2007-10-30
申请人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
发明人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
IPC分类号: C25D17/06
CPC分类号: C25D17/001 , C25D7/123 , C25D17/02
摘要: Embodiments of a closed-contact electroplating cup are disclosed. One embodiment comprises a cup bottom comprising an opening, and a seal disposed on the cup bottom around the opening. The seal comprises a wafer-contacting peak located substantially at an inner edge of the seal. The embodiment also comprises an electrical contact structure disposed over a portion of the seal, wherein the electrical contact structure comprises an outer ring and a plurality of contacts extending inwardly from the outer ring, and wherein each contact has a generally flat wafer-contacting surface. The embodiment further comprises a wafer-centering mechanism configured to center a wafer in the cup.
摘要翻译: 公开了一种闭式电镀杯的实施例。 一个实施例包括一个包括一个开口的杯底,以及一个围绕开口设置在杯底的密封件。 密封件包括基本上位于密封件的内边缘处的与晶片接触的峰。 该实施例还包括设置在密封件的一部分上的电接触结构,其中电接触结构包括外环和从外环向内延伸的多个触点,并且其中每个触头具有大致平坦的晶片接触表面。 该实施例还包括晶圆定心机构,其配置成使晶片位于杯中心。
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公开(公告)号:US20110233056A1
公开(公告)日:2011-09-29
申请号:US13154224
申请日:2011-06-06
申请人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
发明人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
CPC分类号: C25D17/001 , C25D7/123 , C25D17/02
摘要: Embodiments of a closed-contact electroplating cup are disclosed. One embodiment comprises a cup bottom comprising an opening, and a seal disposed on the cup bottom around the opening. The seal comprises a wafer-contacting peak located substantially at an inner edge of the seal. The embodiment also comprises an electrical contact structure disposed over a portion of the seal, wherein the electrical contact structure comprises an outer ring and a plurality of contacts extending inwardly from the outer ring, and wherein each contact has a generally flat wafer-contacting surface. The embodiment further comprises a wafer-centering mechanism configured to center a wafer in the cup.
摘要翻译: 公开了一种闭式电镀杯的实施例。 一个实施例包括一个包括一个开口的杯底,以及一个围绕开口设置在杯底的密封件。 密封件包括基本上位于密封件的内边缘处的与晶片接触的峰。 该实施例还包括设置在密封件的一部分上的电接触结构,其中电接触结构包括外环和从外环向内延伸的多个触点,并且其中每个触头具有大致平坦的晶片接触表面。 该实施例还包括晶圆定心机构,其配置成使晶片位于杯中心。
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公开(公告)号:US20090107836A1
公开(公告)日:2009-04-30
申请号:US11929638
申请日:2007-10-30
申请人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
发明人: Robert Rash , Shantinath Ghongadi , Kousik Ganesan , Zhian He , Tariq Majid , Jeff Hawkins , Seshasayee Varadarajan , Bryan Buckalew
CPC分类号: C25D17/001 , C25D7/123 , C25D17/02
摘要: Embodiments of a closed-contact electroplating cup are disclosed. One embodiment comprises a cup bottom comprising an opening, and a seal disposed on the cup bottom around the opening. The seal comprises a wafer-contacting peak located substantially at an inner edge of the seal. The embodiment also comprises an electrical contact structure disposed over a portion of the seal, wherein the electrical contact structure comprises an outer ring and a plurality of contacts extending inwardly from the outer ring, and wherein each contact has a generally flat wafer-contacting surface. The embodiment further comprises a wafer-centering mechanism configured to center a wafer in the cup.
摘要翻译: 公开了一种闭式电镀杯的实施例。 一个实施例包括一个包括一个开口的杯底,以及一个围绕开口设置在杯底的密封件。 密封件包括基本上位于密封件的内边缘处的与晶片接触的峰。 该实施例还包括设置在密封件的一部分上的电接触结构,其中电接触结构包括外环和从外环向内延伸的多个接触件,并且其中每个接触件具有大致平坦的晶片接触表面。 该实施例还包括晶圆定心机构,其配置成使晶片位于杯中心。
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公开(公告)号:US20090089676A1
公开(公告)日:2009-04-02
申请号:US11865056
申请日:2007-09-30
申请人: Jeff Finkelstein , Richard Sagar , Jeff Hawkins , David Berkowitz , Steve Doss , Justin Kodama , Pieter van der Meulen , Kam Stewart , Matt Crowley , Rich Dellinger
发明人: Jeff Finkelstein , Richard Sagar , Jeff Hawkins , David Berkowitz , Steve Doss , Justin Kodama , Pieter van der Meulen , Kam Stewart , Matt Crowley , Rich Dellinger
IPC分类号: G06F3/048
CPC分类号: G06F16/44
摘要: Various embodiments are directed to improved systems and techniques for allowing a user to navigate to media content on a mobile computing device and/or perform available operations associated with the media content. In one embodiment, for example, a mobile computing device may comprise a display to present a tabbed multimedia graphical user interface comprising a navigation bar including a plurality of navigation tabs for navigating to media content and performing available operations associated with the media content. The plurality of navigation tabs may comprise an audio navigation tab associated with audio content, a pictures and videos navigation tab associated with image and video content, a still camera navigation tab for taking digital photographs, a video camera navigation tab for taking video movies, and an online and bookmarks navigation tab associated with online media content. The tabbed multimedia graphical user interface may present a corresponding view associated with an active navigation tab. Tapping a different navigation tab on the display or inputting a directional command to the mobile computing device may immediately navigate to the different navigation tab and display the corresponding view for enabling a user to navigate to media content and perform available operations associated with the different navigation tab.
摘要翻译: 各种实施例涉及用于允许用户导航到移动计算设备上的媒体内容和/或执行与媒体内容相关联的可用操作的改进的系统和技术。 在一个实施例中,例如,移动计算设备可以包括呈现标签式多媒体图形用户界面的显示器,其包括导航栏,该导航栏包括用于导航到媒体内容并执行与媒体内容相关联的可用操作的多个导航标签。 多个导航标签可以包括与音频内容相关联的音频导航标签,与图像和视频内容相关联的图片和视频导航标签,用于拍摄数字照片的静态照相机导航标签,用于拍摄视频电影的摄像机导航标签,以及 与在线媒体内容相关联的在线和书签导航选项卡。 标签式多媒体图形用户界面可以呈现与活动导航标签相关联的对应视图。 在显示器上轻击不同的导航选项卡或向移动计算设备输入方向命令可以立即导航到不同的导航选项卡并显示相应的视图,以使用户能够导航到媒体内容并执行与不同导航选项卡相关联的可用操作 。
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