Invention Application
- Patent Title: RAPIDLY CLEANABLE ELECTROPLATING CUP SEAL
- Patent Title (中): 快速清洁电镀密封
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Application No.: US13079745Application Date: 2011-04-04
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Publication No.: US20110181000A1Publication Date: 2011-07-28
- Inventor: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- Applicant: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- Applicant Address: US CA San Jose
- Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee: NOVELLUS SYSTEMS, INC.
- Current Assignee Address: US CA San Jose
- Main IPC: F16J15/16
- IPC: F16J15/16

Abstract:
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
Public/Granted literature
- US08398831B2 Rapidly cleanable electroplating cup seal Public/Granted day:2013-03-19
Information query
IPC分类: