发明申请
- 专利标题： Methods and Systems of Transferring, Docking and Processing Substrates
- 专利标题（中）： 转移，对接和处理基板的方法和系统
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申请号： US12973736申请日： 2010-12-20
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公开(公告)号： US20110217469A1公开(公告)日： 2011-09-08
- 发明人: Lawrence Chung-Lai Lei , Alfred Mak , Rex Liu , Kon Park , Samuel S. Pak , Tzy-Chung Terry Wu , Simon Zhu , Ronald L. Rose , Gene Shin , Xiaoming Wang
- 申请人： Lawrence Chung-Lai Lei , Alfred Mak , Rex Liu , Kon Park , Samuel S. Pak , Tzy-Chung Terry Wu , Simon Zhu , Ronald L. Rose , Gene Shin , Xiaoming Wang
- 主分类号： H01L21/677
- IPC分类号： H01L21/677 ; H01L21/673 ; B05D3/04 ; C23C16/44
摘要：
In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.
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