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    Methods and systems of transferring a substrate to minimize heat loss
    8.
    发明申请
    Methods and systems of transferring a substrate to minimize heat loss 有权
    转移衬底以最小化热损失的方法和系统

    公开(公告)号：US20100173439A1

    公开(公告)日：2010-07-08

    申请号：US12319223

    申请日：2009-01-03

    申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry WU ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry WU ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    IPC分类号： H01L21/677 ,  H01L31/18

    CPC分类号： H01L21/6719 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67207 ,  H01L21/67706 ,  H01L21/67748 ,  H01L21/67754 ,  Y10S414/135

    摘要： A method of transferring one or more substrates between process modules or load lock stations while minimizing heat loss is provided. In some embodiments the method comprising the steps of: identifying a destination location D1 for a substrate S1 present at an initial processing location P1; if the destination location D1 is occupied with a substrate S2, maintaining the substrate S1 at the initial processing location P1; and if the destination location D1 is available, transferring the substrate S1 to the destination location D1. In accordance with additional embodiments, the method is carried out on a system for processing substrates which includes two or more process modules, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

    摘要翻译： 提供了一种在过程模块或加载锁定站之间传送一个或多个基板同时最小化热损失的方法。 在一些实施例中，该方法包括以下步骤：识别存在于初始处理位置P1的衬底S1的目的地位置D1; 如果目的地位置D1被基板S2占用，则将基板S1保持在初始处理位置P1; 并且如果目的地位置D1可用，则将基板S1传送到目的地位置D1。 根据另外的实施例，该方法在用于处理基板的系统上进行，该系统包括两个或更多个处理模块，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。

    Methods and systems of transferring a substrate to minimize heat loss
    9.
    发明授权
    Methods and systems of transferring a substrate to minimize heat loss 有权
    转移衬底以最小化热损失的方法和系统

    公开(公告)号：US08110511B2

    公开(公告)日：2012-02-07

    申请号：US12319223

    申请日：2009-01-03

    申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    IPC分类号： H01L21/00

    CPC分类号： H01L21/6719 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67207 ,  H01L21/67706 ,  H01L21/67748 ,  H01L21/67754 ,  Y10S414/135

    摘要： A method of transferring one or more substrates between process modules or load lock stations while minimizing heat loss is provided. In some embodiments the method comprising the steps of: identifying a destination location D1 for a substrate S1 present at an initial processing location P1; if the destination location D1 is occupied with a substrate S2, maintaining the substrate S1 at the initial processing location P1; and if the destination location D1 is available, transferring the substrate S1 to the destination location D1. In accordance with additional embodiments, the method is carried out on a system for processing substrates which includes two or more process modules, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

    摘要翻译： 提供了一种在过程模块或加载锁定站之间传送一个或多个基板同时最小化热损失的方法。 在一些实施例中，该方法包括以下步骤：识别存在于初始处理位置P1的衬底S1的目的地位置D1; 如果目的地位置D1被基板S2占用，则将基板S1保持在初始处理位置P1; 并且如果目的地位置D1可用，则将基板S1传送到目的地位置D1。 根据另外的实施例，该方法在用于处理基板的系统上进行，该系统包括两个或更多个处理模块，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。

    Device and method for wireless lifting assist devices
    10.
    发明授权
    Device and method for wireless lifting assist devices 失效
    无线提升辅助装置的装置和方法

    公开(公告)号：US06554252B2

    公开(公告)日：2003-04-29

    申请号：US10098045

    申请日：2002-03-15

    申请人： Homayoon Kazerooni ,  Dylan Miller Fairbanks ,  Albert Chen ,  Gene Shin

    发明人： Homayoon Kazerooni ,  Dylan Miller Fairbanks ,  Albert Chen ,  Gene Shin

    IPC分类号： B66D100

    CPC分类号： G06F3/017 ,  B66D3/18 ,  G06F3/011

    摘要： A wireless lifting assist device includes a pulley driven by an actuator which is attached to a ceiling. An end-effector is suspended, via a line, from the pulley and interfaces the object to be maneuvered. The wireless lifting assist device further provides an instrumented glove worn by an operator. The glove measures the contact force the operator is exerting on either the object to be moved or the lifting assist device and generates a set of contact signals representing the contact force. The contact signals are transmitted to a controller. The controller generates a set of command signals to control the actuator as a function of the operator contact force such that a predetermined percentage of the force necessary to lift or lower the load is applied by the actuator, with the remaining force being supplied by the operator. The object thus feels lighter to the operator.

    摘要翻译： 无线提升辅助装置包括由附接到天花板的致动器驱动的滑轮。 末端执行器通过一条线从滑轮悬挂，并将待操作的物体接合。 无线提升辅助装置还提供由操作者佩戴的仪表化手套。 手套测量操作员对要移动的物体或提升辅助装置施加的接触力，并产生一组表示接触力的接触信号。 接触信号被传送到控制器。 控制器产生一组命令信号，以根据操作员接触力来控制致动器，使得致动器施加提升或降低负载所需的预定百分比的力，由操作者提供剩余的力 。 因此，对象对于操作者而言更轻。