公开(公告)号：US20110151119A1

公开(公告)日：2011-06-23

申请号：US13038309

申请日：2011-03-01

申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

IPC分类号： H01L21/677 ,  H01L21/673 ,  C23C16/44 ,  C23C16/458 ,  C23C16/56

CPC分类号： H01L21/67173 ,  H01L21/6719 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67748 ,  Y10S414/135

摘要： In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

摘要翻译： 根据本文描述的一些实施例，提供了一种用于将衬底转移到两个或更多个工艺模块的方法，包括将至少一个衬底加载到一个或多个移动横向室中，所述移动横向室承载在邻近 两个或更多个处理模块，并且其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 一个或多个驱动系统被致动以沿着轨道推进一个或多个移动横向室中的至少一个。 所述至少一个移动传送室与所述处理模块中的至少一个对接，并且所述基板从所述移动横向室传送到所述至少一个处理模块。

公开(公告)号：US20070231109A1

公开(公告)日：2007-10-04

申请号：US11692850

申请日：2007-03-28

申请人： Samuel S. Pak ,  Christopher C. Chang

发明人： Samuel S. Pak ,  Christopher C. Chang

IPC分类号： H01L21/677

CPC分类号： H01L21/67236 ,  C23C16/54 ,  H01L21/67126 ,  H01L21/67173 ,  H01L21/67184

摘要： An apparatus and method for processing substrates uses one or more vacuum transfer chamber units to transfer some of the substrates between at least one load lock chamber unit and at least one vacuum process chamber unit.

摘要翻译： 用于处理衬底的装置和方法使用一个或多个真空传送室单元将一些衬底转移到至少一个装载锁定室单元和至少一个真空处理室单元之间。

公开(公告)号：US20100167503A1

公开(公告)日：2010-07-01

申请号：US12319231

申请日：2008-12-31

申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

IPC分类号： H01L21/677 ,  H01L21/36 ,  H01L21/673

CPC分类号： H01L21/67173 ,  H01L21/6719 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67748 ,  Y10S414/135

摘要： In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

摘要翻译： 根据本文描述的一些实施例，提供了一种用于将衬底转移到两个或更多个工艺模块的方法，包括将至少一个衬底加载到一个或多个移动横向室中，所述移动横向室承载在邻近 两个或更多个处理模块，并且其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 一个或多个驱动系统被致动以沿着轨道推进一个或多个移动横向室中的至少一个。 所述至少一个移动传送室与所述处理模块中的至少一个对接，并且所述基板从所述移动横向室传送到所述至少一个处理模块。

公开(公告)号：US08268734B2

公开(公告)日：2012-09-18

申请号：US13038309

申请日：2011-03-01

申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

IPC分类号： H01L21/00

CPC分类号： H01L21/67173 ,  H01L21/6719 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67748 ,  Y10S414/135

摘要： In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

摘要翻译： 根据本文描述的一些实施例，提供了一种用于将衬底转移到两个或更多个工艺模块的方法，包括将至少一个衬底加载到一个或多个移动横向室中，所述移动横向室承载在邻近 两个或更多个处理模块，并且其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 一个或多个驱动系统被致动以沿着轨道推进一个或多个移动横向室中的至少一个。 所述至少一个移动传送室与所述处理模块中的至少一个对接，并且所述基板从所述移动横向室传送到所述至少一个处理模块。

公开(公告)号：US20100162955A1

公开(公告)日：2010-07-01

申请号：US12319225

申请日：2008-12-31

申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Ying Tsong Loh ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Roland L. Rose ,  Gene Shin ,  Xiaoming Wang

发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Ying Tsong Loh ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Roland L. Rose ,  Gene Shin ,  Xiaoming Wang

IPC分类号： H01L21/677 ,  C23C16/00 ,  C23C16/50 ,  C23C16/458

CPC分类号： C23C14/568 ,  C23C16/54 ,  H01L21/67161 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/67754

摘要： In accordance with some embodiments described herein, a system for processing substrates includes two or more process modules, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

摘要翻译： 根据本文所述的一些实施例，用于处理基板的系统包括两个或更多个处理模块，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。

公开(公告)号：US08367565B2

公开(公告)日：2013-02-05

申请号：US12973736

申请日：2010-12-20

申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

IPC分类号： H01L21/00

CPC分类号： B05D3/04 ,  C23C16/44 ,  H01L21/673 ,  H01L21/677

摘要： In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.

摘要翻译： 根据本文描述的一些实施例，提供了用于转移衬底的方法。 该方法包括将一个或多个基底装载到一个或多个移动室的相应移动室中。 移动室可在与两个或更多个处理模块相邻定位的第一轨上移动。 每个移动室被构造成维持指定的气体状态。 相应的移动室沿着第一轨道移动。 相应的移动室被对接到两个或更多个处理模块的相应处理模块。 一个或多个基板中的至少一个从相应的移动室传送到相应的处理模块。

公开(公告)号：US20110217469A1

公开(公告)日：2011-09-08

申请号：US12973736

申请日：2010-12-20

申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

IPC分类号： H01L21/677 ,  H01L21/673 ,  B05D3/04 ,  C23C16/44

CPC分类号： B05D3/04 ,  C23C16/44 ,  H01L21/673 ,  H01L21/677

摘要： In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.

摘要翻译： 根据本文描述的一些实施例，提供了用于转移衬底的方法。 该方法包括将一个或多个基底装载到一个或多个移动室的相应移动室中。 移动室可在与两个或更多个处理模块相邻定位的第一轨上移动。 每个移动室被构造成维持指定的气体状态。 相应的移动室沿着第一轨道移动。 相应的移动室被对接到两个或更多个处理模块的相应处理模块。 一个或多个基板中的至少一个从相应的移动室传送到相应的处理模块。

公开(公告)号：US07897525B2

公开(公告)日：2011-03-01

申请号：US12319231

申请日：2008-12-31

申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Samuel S. Pak ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Ronald L. Rose ,  Gene Shin ,  Xiaoming Wang

IPC分类号： H01L21/00

CPC分类号： H01L21/67173 ,  H01L21/6719 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67748 ,  Y10S414/135

摘要： In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

摘要翻译： 根据本文描述的一些实施例，提供了一种用于将衬底转移到两个或更多个工艺模块的方法，包括将至少一个衬底加载到一个或多个移动横向室中，所述移动横向室承载在邻近 两个或更多个处理模块，并且其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 一个或多个驱动系统被致动以沿着轨道推进一个或多个移动横向室中的至少一个。 所述至少一个移动传送室与所述处理模块中的至少一个对接，并且所述基板从所述移动横向室传送到所述至少一个处理模块。

公开(公告)号：US07628574B2

公开(公告)日：2009-12-08

申请号：US11692850

申请日：2007-03-28

申请人： Samuel S. Pak ,  Christopher C. Chang

发明人： Samuel S. Pak ,  Christopher C. Chang

IPC分类号： H01L21/44

CPC分类号： H01L21/67236 ,  C23C16/54 ,  H01L21/67126 ,  H01L21/67173 ,  H01L21/67184

摘要： An apparatus and method for processing substrates uses one or more vacuum transfer chamber units to transfer some of the substrates between at least one load lock chamber unit and at least one vacuum process chamber unit.

摘要翻译： 用于处理衬底的装置和方法使用一个或多个真空传送室单元将一些衬底转移到至少一个装载锁定室单元和至少一个真空处理室单元之间。