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    Methods and systems of transferring a substrate to minimize heat loss
    8.
    发明申请
    Methods and systems of transferring a substrate to minimize heat loss 有权
    转移衬底以最小化热损失的方法和系统

    公开(公告)号：US20100173439A1

    公开(公告)日：2010-07-08

    申请号：US12319223

    申请日：2009-01-03

    申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry WU ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry WU ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    IPC分类号： H01L21/677 ,  H01L31/18

    CPC分类号： H01L21/6719 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67207 ,  H01L21/67706 ,  H01L21/67748 ,  H01L21/67754 ,  Y10S414/135

    摘要： A method of transferring one or more substrates between process modules or load lock stations while minimizing heat loss is provided. In some embodiments the method comprising the steps of: identifying a destination location D1 for a substrate S1 present at an initial processing location P1; if the destination location D1 is occupied with a substrate S2, maintaining the substrate S1 at the initial processing location P1; and if the destination location D1 is available, transferring the substrate S1 to the destination location D1. In accordance with additional embodiments, the method is carried out on a system for processing substrates which includes two or more process modules, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

    摘要翻译： 提供了一种在过程模块或加载锁定站之间传送一个或多个基板同时最小化热损失的方法。 在一些实施例中，该方法包括以下步骤：识别存在于初始处理位置P1的衬底S1的目的地位置D1; 如果目的地位置D1被基板S2占用，则将基板S1保持在初始处理位置P1; 并且如果目的地位置D1可用，则将基板S1传送到目的地位置D1。 根据另外的实施例，该方法在用于处理基板的系统上进行，该系统包括两个或更多个处理模块，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。

    Methods and systems of transferring a substrate to minimize heat loss
    9.
    发明授权
    Methods and systems of transferring a substrate to minimize heat loss 有权
    转移衬底以最小化热损失的方法和系统

    公开(公告)号：US08110511B2

    公开(公告)日：2012-02-07

    申请号：US12319223

    申请日：2009-01-03

    申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Simon Zhu ,  Gene Shin ,  Xiaoming Wang

    IPC分类号： H01L21/00

    CPC分类号： H01L21/6719 ,  H01L21/67161 ,  H01L21/67173 ,  H01L21/67196 ,  H01L21/67207 ,  H01L21/67706 ,  H01L21/67748 ,  H01L21/67754 ,  Y10S414/135

    摘要： A method of transferring one or more substrates between process modules or load lock stations while minimizing heat loss is provided. In some embodiments the method comprising the steps of: identifying a destination location D1 for a substrate S1 present at an initial processing location P1; if the destination location D1 is occupied with a substrate S2, maintaining the substrate S1 at the initial processing location P1; and if the destination location D1 is available, transferring the substrate S1 to the destination location D1. In accordance with additional embodiments, the method is carried out on a system for processing substrates which includes two or more process modules, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

    摘要翻译： 提供了一种在过程模块或加载锁定站之间传送一个或多个基板同时最小化热损失的方法。 在一些实施例中，该方法包括以下步骤：识别存在于初始处理位置P1的衬底S1的目的地位置D1; 如果目的地位置D1被基板S2占用，则将基板S1保持在初始处理位置P1; 并且如果目的地位置D1可用，则将基板S1传送到目的地位置D1。 根据另外的实施例，该方法在用于处理基板的系统上进行，该系统包括两个或更多个处理模块，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。

    Integrated facility and process chamber for substrate processing
    10.
    发明申请
    Integrated facility and process chamber for substrate processing 审中-公开
    用于基板加工的集成设备和处理室

    公开(公告)号：US20100162954A1

    公开(公告)日：2010-07-01

    申请号：US12319224

    申请日：2008-12-31

    申请人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Ronald L. Rose

    发明人： Lawrence Chung-Lai Lei ,  Alfred Mak ,  Rex Liu ,  Kon Park ,  Tzy-Chung Terry Wu ,  Ronald L. Rose

    IPC分类号： C23C16/00

    CPC分类号： C23C16/54 ,  C23C14/568 ,  H01L21/67161 ,  H01L21/6719 ,  H01L21/67196 ,  H01L21/67727 ,  H01L21/67736 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/67754

    摘要： In accordance with some embodiments described herein, a process module facility is provided, comprising: at least one process chamber carried in frame, a subfloor adjacent the process module, a stationary pump and electrical box positioned atop the subfloor; and gas control lines and vacuum exhaust lines housed within the subfloor and coupled the process chamber. The process module facility may be integrated with a larger system for processing substrates which includes two or more process module facilities, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

    摘要翻译： 根据本文所述的一些实施例，提供了一种处理模块设施，包括：至少一个框架承载的处理室，邻近处理模块的底层地板，定位在底层地板顶部的固定泵和电箱; 以及气体控制管线和真空排气管线，其容纳在底层地板内并且连接处理室。 过程模块设备可以与更大的系统集成，用于处理基板，其包括两个或更多个处理模块设施，基板处理机器人，负载锁定室和横向基板处理器。 横向基板处理器包括被配置为将基板输送到处理模块的移动横向室，其中每个移动横向室被构造成在输送基板期间保持特定的气体状态。 横向基板处理器还包括用于支撑移动横向室的轨道，其中轨道邻近进程模块的进入定位，以及用于将移动横向室移动到轨道上的驱动系统。