Invention Application
- Patent Title: TUNABLE FILTER STRUCTURES AND DESIGN STRUCTURES
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Application No.: US13292729Application Date: 2011-11-09
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Publication No.: US20130113577A1Publication Date: 2013-05-09
- Inventor: James W. ADKISSON , Panglijen Candra , Thomas J. Dunbar , Mark D. Jaffe , Robert K. Leidy , Anthony K. Stamper
- Applicant: James W. ADKISSON , Panglijen Candra , Thomas J. Dunbar , Mark D. Jaffe , Robert K. Leidy , Anthony K. Stamper
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H01L41/22

Abstract:
Tunable filter structures, methods of manufacture and design structures are disclosed. The method of forming a filter structure includes forming a piezoelectric resonance filter over a cavity structure. The forming of the piezoelectric resonance filter includes: forming an upper electrode on one side of a piezoelectric material; and forming a lower electrode on an opposing side of the piezoelectric material. The method further includes forming a micro-electro-mechanical structure (MEMS) cantilever beam at a location in which, upon actuation, makes contact with the piezoelectric resonance filter.
Public/Granted literature
- US09054671B2 Tunable filter structures and design structures Public/Granted day:2015-06-09
Information query
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