Invention Application
- Patent Title: SYSTEM AND METHOD FOR CLEANING GAS INJECTORS
- Patent Title (中): 清洁气体注射器的系统和方法
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Application No.: US13650429Application Date: 2012-10-12
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Publication No.: US20130146095A1Publication Date: 2013-06-13
- Inventor: Armen Avoyan , Cliff La Croix , Hong Shih , Allan Ronne , John Daugherty , Catherine Zhou
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: US CA Fremont
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: US CA Fremont
- Main IPC: B08B9/032
- IPC: B08B9/032 ; B08B3/02

Abstract:
An injector cleaning apparatus with a concentric dual flow introducer and a flow-dispersing injector seat along with a method of cleaning an injector. The concentric dual flow introducer has concentric cleaning fluid flowpaths configured to communicate with a central passage and a plurality of peripheral passages of a gas injector. The input-side injector engaging interface of the concentric dual flow introducer and the flow-dispersing injector seat each have a compressible sealing portion having compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus along with resiliency sufficient to prevent abutment of the gas injector and a rigid facing portion of the input-side injector engaging interface and output-side injector engaging interface respectively.
Public/Granted literature
- US08945317B2 System and method for cleaning gas injectors Public/Granted day:2015-02-03
Information query
IPC分类: