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公开(公告)号：US12064795B2
公开(公告)日：2024-08-20
申请号：US17211518
申请日：2021-03-24
Applicant: Lam Research Corporation
Inventor： Amir A. Yasseri , Hong Shih , John Daugherty , Duane Outka , Lin Xu , Armen Avoyan , Cliff La Croix , Girish Hundi
Abstract: A method for conditioning a component of a wafer processing chamber is provided. The component is placed in an ultrasonic conditioning solution in an ultrasonic solution tank. Ultrasonic energy is applied through the ultrasonic conditioning solution to the component to clean the component. The component is submerged in a megasonic conditioning solution in a tank. Megasonic energy is applied through the megasonic conditioning solution to the component to clean the component.
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公开(公告)号：US08945317B2
公开(公告)日：2015-02-03
申请号：US13650429
申请日：2012-10-12
Applicant: Lam Research Corporation
Inventor： Armen Avoyan , Cliff La Croix , Hong Shih , Allan Ronne , John Daugherty , Catherine Zhou
IPC: B08B9/02
CPC classification number: B08B9/0328
Abstract: An injector cleaning apparatus with a concentric dual flow introducer and a flow-dispersing injector seat along with a method of cleaning an injector. The concentric dual flow introducer has concentric cleaning fluid flowpaths configured to communicate with a central passage and a plurality of peripheral passages of a gas injector. The input-side injector engaging interface of the concentric dual flow introducer and the flow-dispersing injector seat each have a compressible sealing portion having compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus along with resiliency sufficient to prevent abutment of the gas injector and a rigid facing portion of the input-side injector engaging interface and output-side injector engaging interface respectively.
Abstract translation: 具有同心双流引导器和分流喷射器座的喷射器清洁装置以及清洁喷射器的方法。 同心双流引导器具有配置成与气体注射器的中心通道和多个外围通道连通的同心清洁流体流动路径。 同心双流引导器和流量分散注射器座的输入侧注射器接合界面各自具有可压缩的密封部分，该密封部分具有足够的压缩性，足以产生由于通过喷射器清洁装置的清洁流体流动的起始和终止引起的流体清洁浪涌 其弹性足以防止气体注射器和输入侧注射器接合界面和输出侧注射器接合界面的刚性面对部分的邻接。
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公开(公告)号：US20130146095A1
公开(公告)日：2013-06-13
申请号：US13650429
申请日：2012-10-12
Applicant: LAM RESEARCH CORPORATION
Inventor： Armen Avoyan , Cliff La Croix , Hong Shih , Allan Ronne , John Daugherty , Catherine Zhou
CPC classification number: B08B9/0328
Abstract: An injector cleaning apparatus with a concentric dual flow introducer and a flow-dispersing injector seat along with a method of cleaning an injector. The concentric dual flow introducer has concentric cleaning fluid flowpaths configured to communicate with a central passage and a plurality of peripheral passages of a gas injector. The input-side injector engaging interface of the concentric dual flow introducer and the flow-dispersing injector seat each have a compressible sealing portion having compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus along with resiliency sufficient to prevent abutment of the gas injector and a rigid facing portion of the input-side injector engaging interface and output-side injector engaging interface respectively.
Abstract translation: 具有同心双流引导器和分流喷射器座的喷射器清洁装置以及清洁喷射器的方法。 同心双流引导器具有配置成与气体注射器的中心通道和多个外围通道连通的同心清洁流体流动路径。 同心双流引导器和流量分散注射器座的输入侧注射器接合界面各自具有可压缩的密封部分，该密封部分具有足够的压缩性，足以产生由于通过喷射器清洁装置的清洁流体流动的起始和终止引起的流体清洁浪涌 其弹性足以防止气体注射器和输入侧注射器接合界面和输出侧注射器接合界面的刚性面对部分的邻接。
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Patent Agency Ranking
公开(公告)号：US10967407B2
公开(公告)日：2021-04-06
申请号：US15969626
申请日：2018-05-02
Applicant: Lam Research Corporation
Inventor： Amir A. Yasseri , Hong Shih , John Daugherty , Duane Outka , Lin Xu , Armen Avoyan , Cliff La Croix , Girish Hundi
Abstract: An apparatus for conditioning a component of a processing chamber is provided. A tank for holding a megasonic conditioning solution is provided. A mount holds the component immersed in a megasonic conditioning solution, when the tank is filled with the megasonic conditioning solution. A megasonic conditioning solution inlet system delivers the megasonic conditioning solution to the tank. A megasonic transducer head comprises at least one megasonic transducer to provide megasonic energy to the megasonic conditioning solution, wherein the megasonic energy is delivered to the component via the megasonic conditioning solution. A megasonic conditioning solution drain system drains the megasonic conditioning solution from the tank at a location above where the component is held in the megasonic conditioning solution. An actuator moves the megasonic transducer head across the tank.
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公开(公告)号：US12270748B2
公开(公告)日：2025-04-08
申请号：US17273264
申请日：2019-09-05
Applicant: LAM RESEARCH CORPORATION
Inventor： Amir A. Yasseri , Girish M. Hundi , John Michael Kerns , Duane Outka , John Daugherty , Cliff La Croix
IPC: G01N15/1434 , G01N1/22 , G01N15/14
Abstract: An apparatus for measuring contamination on a critical surface of a part is provided. A vessel for mounting the part is provided. An inert gas source is in fluid connection with the vessel and adapted to provide an inert gas to the vessel. At least one diffuser receives the inert gas from the vessel, wherein the critical surface of the part is exposed to the inert gas when the part is mounted in the vessel. At least one analyzer is adapted to receive inert gas from the at least one diffuser and measures contaminants in the inert gas.
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公开(公告)号：US12072318B2
公开(公告)日：2024-08-27
申请号：US17612381
申请日：2020-05-19
Applicant: Lam Research Corporation
Inventor： Amir A. Yasseri , Duane Outka , Armen Avoyan , Kennet Cresencio Baylon , John Daugherty , Girish M. Hundi , Cliff La Croix
CPC classification number: G01N29/14 , B08B3/12 , G01N1/02 , G01N29/02 , H01J37/32788 , G01N2001/002 , G01N2001/4094
Abstract: An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.
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公开(公告)号：US11384430B2
公开(公告)日：2022-07-12
申请号：US17255635
申请日：2019-07-01
Applicant: Lam Research Corporation
Inventor： Hong Shih , Xiaomin Bin , Duane Outka , Eric A. Pape , Gregory A. Pilgrim , Girish M. Hundi , Cliff La Croix
Abstract: A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.
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公开(公告)号：US09748078B2
公开(公告)日：2017-08-29
申请号：US15003485
申请日：2016-01-21
Applicant: Lam Research Corporation
Inventor： Armen Avoyan , Cliff La Croix , Hong Shih
CPC classification number: H01J37/32862 , B08B3/00 , B08B3/02 , H01J21/00 , H01J37/32532 , H01L21/00
Abstract: In one embodiment, a dual phase cleaning chamber may include a turbulent mixing chamber, a fluid diffuser, an isostatic pressure chamber and a rupture mitigating nozzle. The turbulent mixing chamber may be in fluid communication with a first fluid inlet and a second fluid inlet. The fluid diffuser may be in fluid communication with the turbulent mixing chamber. The rupture mitigating nozzle may include a first fluid collecting offset, a second fluid collecting offset, and a displacement damping projection. The displacement damping projection may be disposed between the first and second fluid collecting offset and may be offset away from each of the first fluid collecting offset and the second fluid collecting offset, and towards the fluid diffuser. A pressurized cleaning fluid introduced from the first fluid inlet, the second fluid inlet, or both flows through the outlet passage of the first and second fluid collecting offset.
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