Invention Application
- Patent Title: PLASMA EROSION RESISTANT RARE-EARTH OXIDE BASED THIN FILM COATINGS
- Patent Title (中): 等离子体耐腐蚀稀土氧化物薄膜薄膜
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Application No.: US14306583Application Date: 2014-06-17
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Publication No.: US20140377504A1Publication Date: 2014-12-25
- Inventor: Jennifer Y. Sun , Biraja P. Kanungo , Vahid Firouzdor , Tom Cho
- Applicant: Applied Materials, Inc.
- Main IPC: C23C14/08
- IPC: C23C14/08 ; C23C14/34 ; C23C14/22
Abstract:
An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
Public/Granted literature
- US09850568B2 Plasma erosion resistant rare-earth oxide based thin film coatings Public/Granted day:2017-12-26
Information query
IPC分类:
