Invention Application
- Patent Title: PLATING APPARATUS, PLATING METHOD, AND STORAGE MEDIUM
- Patent Title (中): 电镀设备,镀层方法和存储介质
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Application No.: US14384465Application Date: 2013-02-22
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Publication No.: US20150099355A1Publication Date: 2015-04-09
- Inventor: Yuichiro Inatomi , Takashi Tanaka , Nobutaka Mizutani , Yusuke Saito , Mitsuaki Iwashita
- Applicant: Tokyo Electron Limited
- Priority: JP2012-062687 20120319
- International Application: PCT/JP2013/054502 WO 20130222
- Main IPC: H01L21/288
- IPC: H01L21/288 ; C23C18/16

Abstract:
A plating apparatus 20 includes a substrate holding device 110 configured to hold and rotate the substrate 2; a first discharge device 30 configured to discharge a plating liquid toward the substrate 2 held on the substrate holding device 110; and a top plate 21 that is provided above the substrate 2 and has an opening 22. The first discharge device 30 includes a first discharge unit 33 configured to discharge the plating liquid toward the substrate 2, and the first discharge unit 33 is configured to be moved between a discharge position where the plating liquid is discharged and a standby position where the plating liquid is not discharged. Further, the first discharge unit 33 is configured to be overlapped with the opening 22 of the top plate 21 at the discharge position.
Public/Granted literature
- US09552994B2 Plating apparatus, plating method, and storage medium Public/Granted day:2017-01-24
Information query
IPC分类: