Invention Application
- Patent Title: POLISHING COMPOSITION
- Patent Title (中): 抛光组合物
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Application No.: US14440208Application Date: 2013-10-29
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Publication No.: US20150344738A1Publication Date: 2015-12-03
- Inventor: Shogo ONISHI , Yasuto ISHIDA , Tatsuhiko HIRANO
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu-shi, Aichi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu-shi, Aichi
- Priority: JP2012-243126 20121102
- International Application: PCT/JP2013/079267 WO 20131029
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/321

Abstract:
[Problem] Provided is a polishing composition which is suitable for polishing a polishing object having a metal wiring layer and capable of diminishing the step defect while maintaining a high polishing rate.[Solution] Provided is a polishing composition used in polishing a polishing object having a metal wiring layer, which contains a metal corrosion inhibitor, a complexing agent, a surfactant, and water and in which the solid surface energy of the polishing object surface after polishing the polishing object using the polishing composition is 30 mN/m or less, and the surfactant is preferably an anionic surfactant.
Public/Granted literature
- US09486892B2 Polishing composition Public/Granted day:2016-11-08
Information query