Invention Application
- Patent Title: METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT-EMITTING DEVICE
- Patent Title (中): 制造纳米结构半导体发光器件的方法
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Application No.: US14867659Application Date: 2015-09-28
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Publication No.: US20160099376A1Publication Date: 2016-04-07
- Inventor: Jae Hyeok HEO , Jin Sub LEE , Young Jin CHOI , Hyun Seong KUM , Ji Hye YEON , Dae Myung CHUN , Jung Sub KIM , Han Kyu SEONG
- Applicant: Samsung Electronics Co., Ltd.
- Priority: KR10-2014-0132545 20141001
- Main IPC: H01L33/00
- IPC: H01L33/00 ; H01L33/14 ; H01L33/06 ; H01L33/24 ; H01L33/08

Abstract:
According to an example embodiment, a method of manufacturing a nanostructure semiconductor light-emitting device includes forming nanocores of a first-conductivity type nitride semiconductor material on abase layer to be spaced apart from each other, and forming a multilayer shell including an active layer and a second-conductivity type nitride semiconductor layers on surfaces of each of the nanocores. At least a portion the multilayer shell is formed by controlling at least one process parameter of a flux of source gas, a flow rate of source gas, a chamber pressure, a growth temperature, and a growth rate so as to have a higher film thickness uniformity.
Public/Granted literature
- US09842960B2 Method of manufacturing nanostructure semiconductor light-emitting device Public/Granted day:2017-12-12
Information query
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