METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT-EMITTING DEVICE
    2.
    发明申请
    METHOD OF MANUFACTURING NANOSTRUCTURE SEMICONDUCTOR LIGHT-EMITTING DEVICE 有权
    制造纳米结构半导体发光器件的方法

    公开(公告)号:US20160099376A1

    公开(公告)日:2016-04-07

    申请号:US14867659

    申请日:2015-09-28

    CPC classification number: H01L33/005 H01L33/06 H01L33/08 H01L33/145 H01L33/24

    Abstract: According to an example embodiment, a method of manufacturing a nanostructure semiconductor light-emitting device includes forming nanocores of a first-conductivity type nitride semiconductor material on abase layer to be spaced apart from each other, and forming a multilayer shell including an active layer and a second-conductivity type nitride semiconductor layers on surfaces of each of the nanocores. At least a portion the multilayer shell is formed by controlling at least one process parameter of a flux of source gas, a flow rate of source gas, a chamber pressure, a growth temperature, and a growth rate so as to have a higher film thickness uniformity.

    Abstract translation: 根据一个示例性实施例,一种制造纳米结构半导体发光器件的方法包括:将第一导电型氮化物半导体材料的纳米孔彼此间隔开,并形成包含活性层的多层壳, 在每个纳米孔的表面上的第二导电型氮化物半导体层。 通过控制源气体通量,源气体流量,室压力,生长温度和生长速率的至少一个工艺参数来形成多层壳体的至少一部分,从而具有更高的膜厚度 均匀性

    NANOSTRUCTURE SEMICONDUCTOR LIGHT EMITTING DEVICE
    3.
    发明申请
    NANOSTRUCTURE SEMICONDUCTOR LIGHT EMITTING DEVICE 审中-公开
    纳米结构半导体发光器件

    公开(公告)号:US20160300978A1

    公开(公告)日:2016-10-13

    申请号:US15190406

    申请日:2016-06-23

    Abstract: A nanostructure semiconductor light emitting device includes: a base layer formed of a first-conductivity type nitride semiconductor material; and a plurality of light emitting nanostructures disposed on the base layer to be spaced apart from each other, wherein each of the plurality of light emitting nanostructures includes: a nanocore formed of a first conductivity-type nitride semiconductor material, an active layer disposed on a surface of the nanocore and including a quantum well which is divided into first and second regions having different indium (In) composition ratios in a thickness direction thereof; and a second conductivity-type semiconductor layer disposed on the active layer, and an In composition ratio in the first region is higher than an In composition ratio in the second region.

    Abstract translation: 纳米结构半导体发光器件包括:由第一导电型氮化物半导体材料形成的基极层; 以及设置在所述基底层上以彼此间隔开的多个发光纳米结构,其中所述多个发光纳米结构中的每一个包括:由第一导电型氮化物半导体材料形成的纳米孔,设置在所述基底层上的有源层 包括纳米孔的表面,并且包括量子阱,其被划分为在其厚度方向上具有不同铟(In)组成比的第一和第二区域; 以及设置在所述有源层上的第二导电型半导体层,并且所述第一区域中的In组成比高于所述第二区域中的In组成比。

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