Invention Application
- Patent Title: LIGHT DETECTION DEVICE
- Patent Title (中): 光检测装置
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Application No.: US15213629Application Date: 2016-07-19
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Publication No.: US20160329455A1Publication Date: 2016-11-10
- Inventor: Terumasa NAGANO , Noburo HOSOKAWA , Tomofumi SUZUKI , Takashi BABA
- Applicant: HAMAMATSU PHOTONICS K.K.
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Priority: JP2011-232106 20111021
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L49/02 ; H01L27/146

Abstract:
A semiconductor light detection element includes a plurality of avalanche photodiodes operating in Geiger mode and formed in a semiconductor substrate, quenching resistors connected in series to the respective avalanche photodiodes and arranged on a first principal surface side of the semiconductor substrate, and a plurality of through-hole electrodes electrically connected to the quenching resistors and formed so as to penetrate the semiconductor substrate from the first principal surface side to a second principal surface side. A mounting substrate includes a plurality of electrodes arranged corresponding to the respective through-hole electrodes on a third principal surface side. The through-hole electrodes and the electrodes are electrically connected through hump electrodes, and a side surface of the semiconductor substrate and a side surface of a glass substrate are flush with each other.
Public/Granted literature
Information query
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