Invention Application
- Patent Title: HIGH PERFORMANCE TRANSIENT UNIFORM COOLING SOLUTION FOR THERMAL COMPRESSION BONDING PROCESS
- Patent Title (中): 高性能瞬态均热冷热解决方案
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Application No.: US15221102Application Date: 2016-07-27
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Publication No.: US20170014957A1Publication Date: 2017-01-19
- Inventor: Zhihua Li , Hemanth K. Dhavaleswarapu , Joseph B. Petrini , Shankar Devasenathipathy , Steven B. Roach , Ioan Sauciuc , Pranav K. Desai , George S. Kostiew , Sanjoy K. Saha
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Main IPC: B23K37/00
- IPC: B23K37/00 ; H05K3/34 ; B23K20/02 ; H01L23/00 ; F25B21/02 ; B23K3/08

Abstract:
Various embodiments of thermal compression bonding transient cooling solutions are described. Those embodiments include a an array of vertically separated micro channels coupled to a heater surface, wherein every outlet micro channel comprises two adjacent inlet micro channel, and wherein an inlet and outlet manifold are coupled to the array of micro channels, and wherein the heater surface and the micro channels are coupled within the same block.
Public/Granted literature
- US09943931B2 High performance transient uniform cooling solution for thermal compression bonding process Public/Granted day:2018-04-17
Information query
IPC分类: