Invention Application
- Patent Title: POLISHING COMPOSITION AND POLISHING METHOD USING THE SAME
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Application No.: US15127294Application Date: 2015-02-26
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Publication No.: US20170136600A1Publication Date: 2017-05-18
- Inventor: Toshio SHINODA
- Applicant: FUJIMI INCORPORATED
- Applicant Address: JP Kiyosu-shi, Aichi
- Assignee: FUJIMI INCORPORATED
- Current Assignee: FUJIMI INCORPORATED
- Current Assignee Address: JP Kiyosu-shi, Aichi
- Priority: JP2014-069265 20140328
- International Application: PCT/JP2015/055683 WO 20150226
- Main IPC: B24B37/04
- IPC: B24B37/04 ; C09K3/14 ; H01L21/3105 ; C09G1/02

Abstract:
The present invention provides a polishing composition with which differences in height of a SiN film can be sufficiently removed.The present invention is a polishing composition for use in polishing a polishing object having a surface which is positively charged at a pH of less than 6, containing water, abrasive grains, and an anionic copolymer having a specific unit structure, and having a pH of less than 6, wherein the anionic copolymer has at least two acidic groups having different acidities.
Public/Granted literature
- US10406652B2 Polishing composition and polishing method using the same Public/Granted day:2019-09-10
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