Invention Application
- Patent Title: WAFER LEVEL PACKAGING OF INFRARED CAMERA DETECTORS
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Application No.: US15369702Application Date: 2016-12-05
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Publication No.: US20170328779A1Publication Date: 2017-11-16
- Inventor: Gregory A. Carlson , Alex Matson , Andrew Sharpe , Davey Beard , Paul Schweikert , Robert Simes
- Applicant: FLIR Systems, Inc.
- Main IPC: G01J5/20
- IPC: G01J5/20 ; G01J1/02 ; H01L27/146 ; H01L21/66 ; G01J5/04 ; G01J5/02 ; G01J1/44 ; H01L37/02

Abstract:
An infrared detector useful in, e.g., infrared cameras, includes a substrate having an array of infrared detectors and a readout integrated circuit interconnected with the array disposed on an upper surface thereof, for one or more embodiments. A generally planar window is spaced above the array, the window being substantially transparent to infrared light. A mesa is bonded to the window. The mesa has closed marginal side walls disposed between an outer periphery of a lower surface of the window and an outer periphery of the upper surface of the substrate and defines a closed cavity between the window and the array that encloses the array. A solder seal bonds the mesa to the substrate so as to seal the cavity.
Public/Granted literature
- US10161803B2 Wafer level packaging of infrared camera detectors Public/Granted day:2018-12-25
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