- 专利标题: METHODS AND APPARATUS FOR THREE-DIMENSIONAL NONVOLATILE MEMORY
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申请号: US15376916申请日: 2016-12-13
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公开(公告)号: US20180166559A1公开(公告)日: 2018-06-14
- 发明人: Guangle Zhou , Chuanbin Pan , Juan Saenz , Tanmay Kumar
- 申请人: SANDISK TECHNOLOGIES LLC
- 申请人地址: US TX Plano
- 专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人: SANDISK TECHNOLOGIES LLC
- 当前专利权人地址: US TX Plano
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L27/11521 ; H01L27/11568 ; H01L27/11556 ; H01L27/11582 ; H01L27/24 ; H01L45/00
摘要:
A method is provided that includes forming a word line above a substrate, the word line disposed in a first direction, the word line including a first portion including a first conductive material and a second portion including a second conductive material, forming a bit line above the substrate, the bit line disposed in a second direction perpendicular to the first direction, forming a nonvolatile memory material between the word line and the bit line, the nonvolatile memory material including a semiconductor material layer and a conductive oxide material layer, the semiconductor material layer disposed adjacent the second portion of the word line, and forming a memory cell including the nonvolatile memory material at an intersection of the local bit line and the word line.
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