发明申请
- 专利标题: INDIRECT READOUT FET
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申请号: US15585876申请日: 2017-05-03
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公开(公告)号: US20180323188A1公开(公告)日: 2018-11-08
- 发明人: Jin-Ping Han , Yulong Li , Dennis M. Newns , Paul M. Solomon , Xiao Sun
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号: H01L27/06
- IPC分类号: H01L27/06 ; H01L29/51 ; H01L29/49 ; H01L29/06
摘要:
A metal-insulator-metal (MIM) capacitor structure includes source and drain regions formed within a semiconductor substrate, a first conducting layer formed over the source and drain regions, and a dielectric layer formed over the first conducting layer. The MIM capacitor structure further includes a second conducting layer formed over the dielectric layer, and a sidewall dielectric formed adjacent the first conducting layer and the dielectric layer. An electric field is created indirectly through the sidewall dielectric to an adjacent field effect transistor (FET) channel in the semiconductor substrate.
公开/授权文献
- US10332874B2 Indirect readout FET 公开/授权日:2019-06-25
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