- 专利标题: SEPARATION OF ALPHA EMITTING SPECIES FROM PLATING BATHS
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申请号: US16050760申请日: 2018-07-31
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公开(公告)号: US20180355504A1公开(公告)日: 2018-12-13
- 发明人: Charles L. Arvin , Michael S. Gordon
- 申请人: International Business Machines Corporation
- 主分类号: C25D21/12
- IPC分类号: C25D21/12 ; C25D7/12 ; C25D17/00 ; C25D21/06 ; C25D21/14 ; C25D21/10 ; C25D5/02 ; C25D5/18 ; C25D21/18 ; C25D3/54 ; H01L23/00 ; C25D5/56 ; H01L21/288 ; H01L21/66
摘要:
A plating product fabrication method includes forming a first concentrate. The concentrate includes a metal species, such as Tin, and a trace amount of an alpha emitting species, such as Polonium. The plating product fabrication method also includes creating a circuit between a filtering anode and a filtering cathode and reducing the alpha emitting species from the concentrate by plating the alpha emitting species upon the filtering cathode. In this manner, a purified concentrate is formed. The purified concentrate may be utilized to plate the metal species upon a plating cathode. The purified concentrate may be utilized to form a purified metal species.
公开/授权文献
- US10287702B2 Separation of alpha emitting species from plating baths 公开/授权日:2019-05-14
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