Invention Application
- Patent Title: METHOD OF MANUFACTURING A MAGNETIC MEMORY DEVICE HAVING BUFFER LAYER
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Application No.: US16102522Application Date: 2018-08-13
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Publication No.: US20190067564A1Publication Date: 2019-02-28
- Inventor: Johan Swerts , Kiroubanand Sankaran , Tsann Lin , Geoffrey Pourtois
- Applicant: IMEC vzw
- Priority: EP15199646.9 20151211
- Main IPC: H01L43/08
- IPC: H01L43/08 ; H01L43/10 ; H01L43/12 ; G11C11/16 ; H01L27/22

Abstract:
The disclosed technology generally relates to magnetic memory devices, and more particularly to spin transfer torque magnetic random access memory (STT-MRAM) devices having a magnetic tunnel junction (MTJ), and further relates to methods of fabricating the STT-MRAM devices. In an aspect, a magnetoresistive random access memory (MRAM) device has a magnetic tunnel junction (MTJ). The MTJ includes a magnetic reference layer comprising CoFeB, a magnetic free layer comprising CoFeB, and a barrier layer comprising MgO. The barrier layer is interposed between the magnetic reference layer and the magnetic free layer. The barrier layer has a thickness adapted to tunnel electrons between the magnetic reference layer and the magnetic free layer sufficient to cause a change in the magnetization direction of the variable magnetization under a bias. The MTJ further comprises a buffer layer comprising one or more of Co, Fe, CoFe and CoFeB, where the buffer layer is doped with one or both of C and N.
Information query
IPC分类: