Invention Application
- Patent Title: SUBSTRATE LIQUID PROCESSING APPARATUS AND RECORDING MEDIUM
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Application No.: US16126106Application Date: 2018-09-10
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Publication No.: US20190080938A1Publication Date: 2019-03-14
- Inventor: Takahiro Kawazu , Takafumi Tsuchiya , Hideaki Sato , Hidemasa Aratake , Osamu Kuroda , Takashi Nagai , Jiro Harada
- Applicant: Tokyo Electron Limited
- Priority: JP2017-173864 20170911; JP2018-147545 20180806
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G05B19/418

Abstract:
A substrate liquid processing apparatus A1 includes a processing liquid storage unit 38 configured to store a processing liquid therein; a processing liquid drain unit 41 configured to drain the processing liquid from the processing liquid storage unit 38; and a control unit 7. The control unit 7 performs a first control in a constant concentration mode in which a concentration of the processing liquid in the processing liquid storage unit 38 is regulated to a predetermined set concentration and a second control in a concentration changing mode in which the concentration of the processing liquid is changed. In the second control, a set concentration after concentration change is compared with a set concentration before the concentration change, and when the set concentration after the concentration change is lower, the control unit controls the processing liquid drain unit 41 to start draining of the processing liquid.
Public/Granted literature
- US11869780B2 Substrate liquid processing apparatus Public/Granted day:2024-01-09
Information query
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