- 专利标题: HEAT INSULATION STRUCTURE AND VERTICAL HEAT TREATMENT APPARATUS
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申请号: US16297858申请日: 2019-03-11
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公开(公告)号: US20190287828A1公开(公告)日: 2019-09-19
- 发明人: Koji Yoshii , Tatsuya Yamaguchi , Hiroyuki Hayashi , Mitsuhiro Okada , Satoshi Takagi , Toshihiko Takahashi , Masafumi Shoji , Kazuya Kitamura
- 申请人: Tokyo Electron Limited
- 优先权: JP2018-045873 20180313
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/673
摘要:
Provided is a heat insulation structure used for a vertical heat treatment apparatus that performs a heat treatment on a substrate. The vertical heat treatment apparatus includes: a processing container having a double tube structure including an inner tube and an outer tube closed upward, the processing container having an opening at a lower end thereof; a gas supply section and exhaust section provided on a lower side of the processing container; a lid configured to introduce or discharge the substrate into or from the opening and to open/close the opening; and a heating section provided to cover the processing container from an outside. The heat insulation structure is provided between the inner tube and the outer tube.
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