- 专利标题: SPIN ORBIT TORQUE (SOT) MEMORY DEVICES AND METHODS OF FABRICATION
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申请号: US16024393申请日: 2018-06-29
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公开(公告)号: US20200006630A1公开(公告)日: 2020-01-02
- 发明人: Noriyuki Sato , Tanay Gosavi , Gary Allen , Sasikanth Manipatruni , Kaan Oguz , Kevin O'Brien , Christopher Wiegand , Angeline Smith , Tofizur Rahman , Ian Young , Ben Buford
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L43/02
- IPC分类号: H01L43/02 ; H01L43/12 ; H01L27/22 ; G11C11/16 ; H01F10/32
摘要:
A spin orbit torque (SOT) memory device includes a SOT electrode having a spin orbit coupling material. The SOT electrode has a first sidewall and a second sidewall opposite to the first sidewall. The SOT memory device further includes a magnetic tunnel junction device on a portion of the SOT electrode. A first MTJ sidewall intersects the first SOT sidewall and a portion of the first MTJ sidewall and the SOT sidewall has a continuous first slope. The MTJ device has a second sidewall that does not extend beyond the second SOT sidewall and at least a portion of the second MTJ sidewall has a second slope.
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