- 专利标题： Backside Illuminated Photo-Sensitive Device with Gradated Buffer Layer
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申请号： US16993824申请日： 2020-08-14
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公开(公告)号： US20200373445A1公开(公告)日： 2020-11-26
- 发明人: Yu-Hung Cheng , Chia-Shiung Tsai , Cheng-Ta Wu , Xiaomeng Chen , Yen-Chang Chu , Yeur-Luen Tu
- 申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 主分类号： H01L31/0352
- IPC分类号： H01L31/0352 ; H01L31/0232 ; H01L31/18 ; H01L31/028 ; H01L31/109 ; H01L27/146 ; H01L31/105
摘要：
A photo-sensitive device includes a uniform layer, a gradated buffer layer over the uniform layer, a silicon layer over the gradated buffer layer, a photo-sensitive light-sensing region in the uniform layer and the silicon layer, a device layer on the silicon layer, and a carrier wafer bonded to the device layer.
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