- 专利标题: STAGE AND INSPECTION APPARATUS
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申请号: US17101735申请日: 2020-11-23
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公开(公告)号: US20210156891A1公开(公告)日: 2021-05-27
- 发明人: Dai KOBAYASHI , Hiroyuki NAKAYAMA , Naoki AKIYAMA
- 申请人: Tokyo Electron Limited
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 优先权: JP2019-212654 20191125
- 主分类号: G01R1/44
- IPC分类号: G01R1/44 ; G01R1/073 ; G01R31/28
摘要:
A stage on which an inspection object having an electronic device against which a contact terminal of a probe card of an inspection apparatus is pressed by a load applied thereto is placed, includes a first cooling plate including a first coolant flow path formed therein, a heating source mounted on the first cooling plate and including a plurality of light emitting elements so as to heat the inspection object, a transparent member provided on the heating source and transmitting light output from the heating source, a second cooling plate provided on the transparent member so as to hold the inspection object and including a second coolant flow path formed therein, and a transparent resin layer filled between the first cooling plate and the transparent member so as to cover the heating source.
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