Invention Application
- Patent Title: CHEMICAL SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
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Application No.: US17138301Application Date: 2020-12-30
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Publication No.: US20210197237A1Publication Date: 2021-07-01
- Inventor: Tae Suk YUN , Hyeon Suk PARK
- Applicant: SEMES CO., LTD.
- Applicant Address: KR Chungcheongnam-do
- Assignee: SEMES CO., LTD.
- Current Assignee: SEMES CO., LTD.
- Current Assignee Address: KR Chungcheongnam-do
- Priority: KR10-2019-0179872 20191231
- Main IPC: B08B3/08
- IPC: B08B3/08 ; B08B3/02 ; B08B13/00 ; B08B3/10
Abstract:
An apparatus for processing a substrate includes a housing having a processing space in which the substrate is processed, a support unit that supports the substrate in the processing space, a nozzle that dispenses a chemical onto the substrate placed on the support unit, a chemical supply unit that supplies the chemical to the nozzle, and a controller that controls the chemical supply unit.
Public/Granted literature
- US11684955B2 Chemical supply unit, substrate processing apparatus, and substrate processing method Public/Granted day:2023-06-27
Information query
IPC分类:
