Invention Application
- Patent Title: METHODS FOR CONTROLLING PHYSICAL VAPOR DEPOSITION METAL FILM ADHESION TO SUBSTRATES AND SURFACES
-
Application No.: US17537035Application Date: 2021-11-29
-
Publication No.: US20220081752A1Publication Date: 2022-03-17
- Inventor: Akhil Srinivasan , Yifei Wang
- Applicant: Medtronic MiniMed, Inc.
- Applicant Address: US CA Northridge
- Assignee: Medtronic MiniMed, Inc.
- Current Assignee: Medtronic MiniMed, Inc.
- Current Assignee Address: US CA Northridge
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/54 ; C23C14/30 ; C23C14/34 ; C23C14/02 ; C23C14/18 ; A61B5/145 ; C23C14/20 ; G01N27/327 ; G01N27/411 ; C23C14/14 ; C23C14/06

Abstract:
A method of depositing of a film on a substrate with controlled adhesion. The method comprises depositing the film including metal, wherein the metal is deposited on the substrate using physical vapor deposition at a pressure that achieves a pre-determined adhesion of the film to the substrate. The pre-determined adhesion allows processing of the film into a device while the film is adhered to the substrate but also allows removal of the device from the substrate.
Information query
IPC分类: